Physical and optical properties of an antireflective layer based on SiOxNy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 5, 1997, Pages 2777-2780

  Gaillard, F ^a   Schiavone, P ^a   Brault, P ^b  

^a ORANGE LABS   (France)

^b UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031520893     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580822     Document Type: Article

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