Fluoroether bonding to carbon overcoats

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 5, 1997, Pages 2755-2765

  Cornaglia, Laura ^a,b   Gellman, Andrew J ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b INSTITUTO DE INVESTIGACIONES EN CATÁLISIS Y PETROQUÍMICA   (Argentina)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031520891     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580819     Document Type: Article

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