Early nitriding stage of evaporated-Ti thin films by N-ion implantation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 1848-1852

  Kasukabe, Y ^a   Takeda, S ^a   Fiujno, Y ^a   Yamada, Y ^a   Nagata, S ^b   Kishimoto, M ^b   Yamaguchi, S ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031500119     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580651     Document Type: Article

References (19)

1. J. E. Sundgren, Thin Solid Films 128, 21 (1985).
2. D. C. Kothari, P. Scardi, S. Gialanella, and L. Guzman, Philos. Mag. B 61, 627 (1990).
3. F. Elstner, A. Ehrlich, H. Giegengack, H. Kupfer, and F. Richter, J. Vac. Sci. Technol. A 12, 476 (1994).
4. B. O. Johansson, J. E. Sundgren, J. E. Green, A. Rockett, and S. A. Barnett, J. Vac. Sci. Technol. A 3, 303 (1985).
5. N. Biunno, J. Narayan, A. R. Srivatsa, and O. W. Holland, Appl. Phys. Lett. 55, 405 (1989).
6. J. Narayan, P. Tiwari, X. Chen, J. Singh, R. Chowdhury, and T. Zheleva, Appl. Phys. Lett. 61, 1290 (1992).
7. T. Kawakubo, K. Sano, and M. Oose, Jpn. J. Appl. Phys. 1 32, L1692 (1993).
8. Y. W. Beag, K.-Y. Min, M. Inoue, M. Kiuchi, K. Fujii, and R. Shimizu, Jpn. J. Appl. Phys. 1 32, 4714 (1993).
9. K.-Y. Min, M. Tarutani, M. Inoue, and R. Shimizu, Jpn. J. Appl. Phys. 1 33, 3566 (1994).
10. S. Miyagawa, K. Saitoh, H. Niwa, M. Ikeyama, G. Massouras, and Y. Miyagawa, J. Appl. Phys. 72, 5663 (1992).
11. L. Hultman, U. Helmersson, S. A. Barnett, J. E. Sundgren, and J. E. Greene, J. Appl. Phys. 61, 552 (1987).
12. K. Sano, M. Oose, and T. Kawakubo, Jpn. J. Appl. Phys, 1 34, 3266 (1995).
13. Y. Kasukabe, J. Ootubo, S. Nagata, M. Kishimoto, Y. Fujino, S. Yamaguchi, and Y. Yamada, Jpn. J. Appl. Phys. 1 34, 3234 (1995).
14. Y. Yamada, Y. Kasukabe, and K. Yoshida, Jpn. J. Appl. Phys. 1 29, 706 (1990).
15. Y. Yamada, Y. Kasukabe, S. Nagata, and S. Yamaguchi, Jpn. J. Appl. Phys. 1 29, L1888 (1990).
16. Y. Kasukabe, Y. Yamada, and L. A. Bursill, Philos. Mag. A 67, 73 (1993).
17. Y. Kasukabe and Y. Yamada, Jpn. J. Appl. Phys. 1 29, L1904 (1990).
18. A. Chrétien, W. Freundlich, and M. Bichara, Comptes Rendus 238, 1423 (1954).
19. L. E. Toth, Transition Metal Carbides and Nitrides, edited by J. L. Margrave (Academic, London, 1971), p. 87.