Analyses of Spatially Resolved Electron Energy Distribution and Transport Properties in Steady State in CF4

Journal of the Physical Society of Japan

Volumn 66, Issue 6, 1997, Pages 1672-1687

  Takeda, Akihide ^a   Ikuta, Nobuaki ^b  

^a SHIKOKU UNIVERSITY   (Japan)

^b CHIBA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Boundary condition; CF4; Hydrodynamic; Steady state; Transport properties; Velocity distribution

Indexed keywords

EID: 0031498723     PISSN: 00319015     EISSN: None     Source Type: Journal    
DOI: 10.1143/JPSJ.66.1672     Document Type: Article

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