Possible method of reducing annealing temperatures of radiation defects in ion-implanted silicon carbide

Technical Physics Letters

Volumn 23, Issue 10, 1997, Pages 746-747

  Dzhibuti, Z V ^a   Dolidze, N D ^a   Narsiya, G Sh ^a   Eristavi G L ^a  

^a TBILISI STATE UNIVERSITY   (Georgia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031497589     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1261786     Document Type: Article

References (13)

1. Yu. M. Tairov and V. F. Tsvetkov, in Handbook of Electrical Engineering Materials, Vol. 3, edited by Yu. V. Koritskǐ, V. V. Pasynkov, and B. M. Tareev [in Russian], Énergatomizdat, Leningrad (1988), pp. 446-472.
2. V. V. Gusakov, A. P. Kovarskiǐ, V. V. Popov, and B. E. Samorukov, Vopr. Radioélektron. Ser. Tekh. Proizvod. Oborud. No. 1, 45 (1986).
3. V. V. Bolotov, N. B. Pridachin, and L. S. Smimov, Fiz. Tekh. Poluprovodn. 10, 566 (1976) [Sov. Phys. Semicond. 10, 338 (1976)].
4. V. V. Bolotov, N. B. Pridachin, and L. S. Smimov, Fiz. Tekh. Poluprovodn. 10, 566 (1976) [Sov. Phys. Semicond. 10, 338 (1976)].
5. A. V. Dburechenskiǐ, G. A. Kachurin, E. V. Nidaev, and L. S. Smirnov, Pulsed Annealing of Semiconductor Materials [in Russian], Nauka, Moscow (1982).
6. V. V. Kapaev, Yu. V. Kopaev, and S. N. Molotkov, Mikroélektronika 12, 499 (1983).
7. I. G. Gverdtsiteli, A. B. Gerasimov, Z. V. Dzhibuti, and M. G. Pkhakadze, Poverkhnost' No. 11, 132 (1985).
8. A. G. Ital'yantsev, V. N. Mordkovich, and É. M. Temper, Fiz. Tekh. Poluprovodn. 18, 928 (1984) [Sov. Phys. Semicond. 18, 577 (1984)].
9. A. G. Ital'yantsev, V. N. Mordkovich, and É. M. Temper, Fiz. Tekh. Poluprovodn. 18, 928 (1984) [Sov. Phys. Semicond. 18, 577 (1984)].
10. A. B. Gerasimov, Z. V. Dzhibuti, M. A. Kuprava, and M. G. Pkhakadze, Soobshch. Akad. Nauk Gruzii 145, No. 1, 67 (1992).
11. Z. B. Dzhibuti and N. D. Dolidze, Pis'ma Zh. Tekh. Fiz. 17(5), 41 (1991) [Sov. Tech. Phys. Lett. 17, 172 (1991)].
12. Z. B. Dzhibuti and N. D. Dolidze, Pis'ma Zh. Tekh. Fiz. 17(5), 41 (1991) [Sov. Tech. Phys. Lett. 17, 172 (1991)].
13. A. B. Gerasimov, N. D. Dolidze, R. M. Donina, B. M. Konovalenko, G. L. Ofengeim, and A. A. Tsertsvadze, Phys. Status Solidi A 70, 23 (1982).