Theoretical and experimental investigation of interferometric absorbers for thermal infrared detectors

Sensors and Materials

Volumn 9, Issue 2, 1997, Pages 117-130

  Eriksson, Pontus ^a   Andersson, Jan Y ^b   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b ACREO AB   (Sweden)

Author keywords

Air gap; FTIR; Interferometric absorber; Suicide; Surface micromachining

Indexed keywords

EID: 0031482890     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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