Simulation of pressure effects in a multipulsed nitrogen plasma source ion implantation system

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 1963-1969

  Bear, Michael J ^a,b   Guillory, John U ^a  

^a GEORGE MASON UNIVERSITY   (United States)

^b LOCKHEED MARTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031482159     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580666     Document Type: Article

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