Sputtering of AlxGa1-xAs semiconductor targets by Ar+ ions with energies of 2-14 keV

Technical Physics

Volumn 42, Issue 6, 1997, Pages 688-691

  Berg, N A ^a   Soshnikov, I P ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031480182     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1258823     Document Type: Article

References (34)

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