Studies on the SEM examination of un-coated non-conductive specimens prepared by plasma-ion shower method

Journal of Electron Microscopy

Volumn 46, Issue 6, 1997, Pages 457-466

  Akahori, Hiroshi ^a   Yoshida, Hisaharu ^a   Amakawa, Yuri ^b   Takahashi, Ichiro ^b   Yamada, Mitsuhiko ^c  

^a Vacuum Device Inc   (Japan)

^b TEIKYO UNIVERSITY   (Japan)

^c NONE

Author keywords

EPMA analysis; Non conductive specimen; Plasma ion shower; SEM examination; Un coated specimens

Indexed keywords

ANIMALIA; GLOMERULUS;

ELECTRIC DISCHARGES; POSITIVE IONS;

AR+ IONS; ELECTRODE SURFACES; EPMA ANALYSIS; IRRADIATION METHODS; NON-CONDUCTIVE SPECIMEN; PLASMA DISCHARGE; PLASMA IONS; PLASMA-ION SHOWER; SEM EXAMINATION; UN-COATED SPECIMEN;

ION BEAMS;

EID: 0031425990     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/oxfordjournals.jmicro.a023543     Document Type: Article

References (6)

1. Welter L M and McKee A N (1972) Observations on uncoated, non conducting or thermally sensitive specimens using a fast scanning field emission source scanning electron microscopy. Proc. 5th Annu. SEM Symp. 1972:161-168.
2. Moncrieff D A, Robinson V N E and Harris L B (1978) Charge neutralization of insulating surfaces in the SEM by gas ionization. J. Phys. D: Appl. Phys., 11: 2135-2325.
3. Crawford C K (1979) Charge neutralization using very low energy ions. In: Scanning Electron Microscopy II, ed O'Hare A M F, pp. 31-46, (SEM Inc., Chicago).
4. Crawford C K (1980) Ion charge neutralization effects in scanning electron microscopes. In: Scanning Electron Microscopy IV, ed. O'Hare A M F, pp. 11-25, (SEM Inc., Chicago).
5. Kanaya K, Muranaka Y and Fujita H (1982) Uncoated observation and etching of non-conductive materials by ion beam bombardment in scanning electron microscopy. In: Scanning Electron Microscopy VI, ed. O'Hare A M F, pp. 1379-1394, (SEM Inc., Chicago).
6. Koenig H und Helwig G (1951) Ueber duenne aus Kohlenwasserstoffen durch Electronen-oder Ionenbeschuss gebildete Schichten. Z. Phys., 491-503.