Effects of gas pressure on low-pressure electron-beam lithography

Scanning

Volumn 19, Issue 7, 1997, Pages 466-468

  Paul, B K ^a  

^a OREGON STATE UNIVERSITY   (United States)

Author keywords

Charge distribution; Environmental scanning electron microscope; Gas pressure effects; Low pressure electron beam lithography; Microfabrication

Indexed keywords

ARTICLE; ATMOSPHERIC PRESSURE; ELECTRIC RESISTANCE; ELECTRON BEAM; GAS FLOW; MECHANICS; PRESSURE CHAMBER; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 0031396608     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950190703     Document Type: Article

References (7)

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