Organic outgassing from cleanroom materials including HEPA/ULPA filter components: Standardized testing proposal

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1997, Pages 211-226

  Camenzind, Mark ^a   Kumar, Anurag ^a  

^a Balazs Analytical Services   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLEAN ROOMS; CONTAMINATION; DEGASSING; DESORPTION; ENVIRONMENTAL TESTING; FILTERS (FOR FLUIDS); GAS CHROMATOGRAPHY; IMPURITIES; MASS SPECTROMETRY; PHOSPHATES; SILICON WAFERS; SILICONES;

DYNAMIC HEADSPACE; HIGH EFFICIENCY PARTICULATE AIR (HEPA); ULTRA LOW PENETRATION AIR (ULPA);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031388659     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)