Benchmarking semiconductor manufacturing

International Integrated Reliability Workshop Final Report

Volumn , Issue , 1997, Pages 1-6

  Leachman, Robert C ^a   Hodges, David A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER INTEGRATED MANUFACTURING; INDUSTRIAL PLANTS; PERSONNEL; PROCESS ENGINEERING; PRODUCTION CONTROL; PRODUCTIVITY; SILICON WAFERS; SOCIETIES AND INSTITUTIONS; VLSI CIRCUITS;

DEFECT DENSITY; EQUIPMENT PRODUCTION RATES; INFORMATION SYSTEMS; PRODUCTION EQUIPMENT; WAFER FABRICATION PLANTS; WAFER THROUGHPUT TIME;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031388379     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)