Comparison of bulk and surface passivation properties of plasma nitrides on Si and SiGe solar cells

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 1997, Pages 83-86

  Said, K ^a   Beaucarne, G ^a   Libezny, M ^a   Laureys, W ^a   Vinckier, K ^a   Nijs, J ^a   Poortmans, J ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH TEMPERATURE EFFECTS; HYDROGENATION; NITRIDES; PASSIVATION; PLASMA APPLICATIONS; QUANTUM EFFICIENCY; SEMICONDUCTING SILICON COMPOUNDS;

PLASMA NITRIDES; SURFACE RECOMBINATION;

SILICON SOLAR CELLS;

EID: 0031388368     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)