Microstructural evaluation of ZnO thin films deposited by MOCVD

Materials Research Society Symposium - Proceedings

Volumn 482, Issue , 1997, Pages 131-136

  Gorla, C R ^a   Liang, S ^a   Emanetoglu, N ^a   Mayo, W E ^a   Lu, Y ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; FILM GROWTH; INTERFACES (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; MORPHOLOGY; SAPPHIRE; SEMICONDUCTING ZINC COMPOUNDS; SUBSTRATES; THIN FILMS; ZINC OXIDE;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY (HRTEM);

SEMICONDUCTING FILMS;

EID: 0031388247     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-482-131     Document Type: Conference Paper

References (8)