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Volumn 483, Issue , 1997, Pages 197-202
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Understanding the role of defects in limiting the minority carrier lifetime in SiC
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
DIFFUSION IN SOLIDS;
DISLOCATIONS (CRYSTALS);
ELECTRON BEAMS;
EPITAXIAL GROWTH;
PHOTOCONDUCTIVITY;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR DOPING;
SURFACE TREATMENT;
THIN FILMS;
DIFFUSION LENGTH MAPPING (DLM);
ELECTRON BEAM INDUCED CURRENT (EBIC);
PHOTOCONDUCTIVE DECAY (PCD);
SILICON CARBIDE;
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EID: 0031387529
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-483-197 Document Type: Conference Paper |
Times cited : (7)
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References (6)
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