Ultrasonic time-frequency characterization of silicon wafers at elevated temperatures

American Society of Mechanical Engineers, EEP

Volumn 22, Issue , 1997, Pages 37-43

  Suh, C Steve ^a   Rabroker, G Andrew ^a   Burger, Christian P ^a   Chona, Ravinder ^a  

^a TEXAS A AND M UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY DOMAIN ANALYSIS; INTERFEROMETERS; NONDESTRUCTIVE EXAMINATION; OPTICAL WAVEGUIDES; THERMAL EFFECTS; TIME DOMAIN ANALYSIS; ULTRASONIC APPLICATIONS; WAVELET TRANSFORMS;

FIBER TIP INTERFEROMETER (FTI) SYSTEMS;

SILICON WAFERS;

EID: 0031387122     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)