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Volumn 50, Issue 12, 1997, Pages 34-39

Foundation of the silicon age

(1)  Ross, Ian M a  

a NONE

Author keywords

[No Author keywords available]

Indexed keywords

HISTORY; MASKS; OHMIC CONTACTS; OXIDES; PHOTOLITHOGRAPHY; PROBLEM SOLVING; RELIABILITY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; TECHNOLOGY; TRANSISTORS;

EID: 0031386877     PISSN: 00319228     EISSN: None     Source Type: Trade Journal    
DOI: 10.1063/1.881628     Document Type: Article
Times cited : (8)

References (0)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.