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Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 435-441

Large area pulsed laser deposition of ceramic films

(3) Kreutz, E W a Backes, G a Mertin, M b,c

a RWTH AACHEN UNIVERSITY (Germany)

b FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY (Germany)

c CARL ZEISS SMT AG (Germany)

Author keywords

Ceramics; Large area coverage; Pulsed laser deposition

Indexed keywords

ALUMINA; DEPOSITION; ELLIPSOMETRY; EXCIMER LASERS; MORPHOLOGY; OPTICAL MICROSCOPY; PULSED LASER APPLICATIONS; STAINLESS STEEL; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

POWER DENSITY DISTRIBUTION; PULSED AREA DEPOSITION;

CERAMIC COATINGS;

EID: 0031386711 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00168-0 Document Type: Article

Times cited : (15)

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