Integration of a MEMS education curriculum with interdisciplinary research

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 1997, Pages 137-140

  Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENGINEERING EDUCATION; ENGINEERING RESEARCH; INTEGRATED CIRCUIT LAYOUT; MICROELECTRONICS; MICROMACHINING;

MICROMETER SCALED MIXED TECHNOLOGY DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0031385092     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)