Palladium-hydrogen related complexes in silicon

Materials Science Forum

Volumn 258-263, Issue PART 1, 1997, Pages 307-312

  Sachse, J U ^a   Weber, J ^a   Lemke, H ^b  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

Hydrogen; Silicon; Transition metals

Indexed keywords

CRYSTAL DEFECTS; DEEP LEVEL TRANSIENT SPECTROSCOPY; ETCHING; HEAT TREATMENT; HYDROGEN BONDS; PALLADIUM; SEMICONDUCTOR DOPING;

WET CHEMICAL ETCHING;

SEMICONDUCTING SILICON;

EID: 0031384813     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.258-263.307     Document Type: Article

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