Direct microfabrication of chalcogenide glasses by light and electron-beam exposures

Solid State Phenomena

Volumn 55, Issue , 1997, Pages 153-158

  Tanaka, K ^a   Yoshida, N ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Chalcogenide Glass; Electron Beam; Grating; Ionic Migration; Microlens; Micropattern; Photoexpansion

Indexed keywords

ARSENIC COMPOUNDS; DEFORMATION; ELECTRON BEAMS; RADIATION EFFECTS; SEMICONDUCTOR DEVICE MANUFACTURE; SILVER;

ARSENIC DISULFIDE; CHALCOGENIDE GLASSES; MICROPATTERNING PROCESS;

SEMICONDUCTING GLASS;

EID: 0031384675     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.55.153     Document Type: Article

References (23)

1. W.M. Moreau, Semiconducting Lithography, (Plenum, New York, 1988).
2. A.V. Kolobov and S.R. Elliott, Adv. Phys. 40 (1991), p. 625.
3. M. Terao, K. Shigematsu, M. Ojima, Y. Taniguchi, S. Horigome and S. Yonezawa, J. Appl. Phys. 50 (1979) p. 6881.
4. A.L. Despotuli, A.A. Shestakov and N.V. Lichkova, Solid State Ionics 70/71 (1994) p. 130.
5. H. Hisakuni and K. Tanaka, Appl. Phys. Lett. 65 (1994) p. 2925.
6. H. Hisakuni and K. Tanaka, Opt. Lett. 20 (1995) p. 958.
7. K. Tanaka, unpublished.
8. N. Yoshida and K. Tanaka, J. Non-Cryst. Solids (in press).
9. N. Yoshida and K. Tanaka, unpublished.
10. K. Tanaka, J. Non-Cryst. Solids 35& 36 (1980) p. 1023.
11. K. Tanaka and H. Hisakuni, J. Non-Cryst. Solids 198-200 (1996) p. 714.
12. K. Tanaka, Rev. Solid State Sci. 4 (1990) p. 641.
13. K. Shimakawa, A. Kolobov and S.R. Elliott. Adv. Phys. 44 (1995) p. 475.
14. H. Koseki and A. Odajima, Jpn. J. Appl. Phys. 21 (1982) p. 424.
15. D.K. Tagantsev and S.V. Nemilov, Sov. J. Glass Phys. Chem. 15 (1989) p. 220.
16. H. Hisakuni and K. Tanaka, Science 270 (1995) p. 974.
17. H. Fritzsche, Solid State Commun. 99 (1996) p. 153.
18. K. Tanaka, S. Nakayama and N. Toyosawa, Philos. Mag. Lett. 74 (1996) p. 281.
19. A.R. Silin, J. Non-Cryst. Solids 129 (1991) p. 40.
20. K. Tanaka, J. Non-Cryst. Solids 164-166 (1993) p. 1179.
21. Y. Kawamoto, N. Nagura and S. Tsuchihashi, J. Amer. Ceram. Soc. 56 (1973) p. 289.
22. D.J. Robbins, J. Electrochem. 127 (1980) p. 2694.
23. N. Yoshida and K. Tanaka, J. Appl. Phys. 78 (1995) p. 1745.