Impact of emissivity-independent temperature control in rapid thermal processing

Materials Research Society Symposium - Proceedings

Volumn 470, Issue , 1997, Pages 43-48

  Oh, Minseok ^a   Nguyenphu, Binh ^a   Huang, Robert ^a   Ma, Yi ^a   Chaplin, Stefanie ^a   Brady, David ^a   Lee, Cynthia ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; LIGHT EMISSION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DOPING; TEMPERATURE CONTROL;

RAPID THERMAL PROCESSING;

AMORPHOUS SILICON;

EID: 0031384515     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-470-43     Document Type: Conference Paper

References (6)