TiAIN-Al2O3 PVD-multilayer for metal cutting operation

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 790-793

  Leyendecker, T ^a   Rass, I ^b   Erkens, G ^a   Feldhege, M ^b  

^a CemeCon GmbH   (Germany)

^b Euromat GmbH   (Germany)

Author keywords

Al2O3; Cutting tools; DC sputtering; Multilayer; PVD; RF sputtering

Indexed keywords

CARBIDE CUTTING TOOLS; CORUNDUM; EVAPORATORS; METAL CUTTING; METALLIC FILMS; MULTILAYERS; SPUTTER DEPOSITION; TITANIUM COMPOUNDS; VAPOR DEPOSITION;

PHYSICAL VAPOR DEPOSITION (PVD); SPUTTER ION PLATING;

PROTECTIVE COATINGS;

EID: 0031383897     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00176-X     Document Type: Article

References (5)

1. A. Chapman, Glow Discharge Processes, Wiley, New York, 1980.
2. T. Leyendecker, Uber neuartige Schneidwerkzeugbeschichtungen auf Ti- und Al-Basis, PhD dissertation, RWTH Aachen, 1986.
3. H. Holleck, Superhard Ti-B-C-N single- and multilayer PVD coatings, J. Vac. Sci. (1996) paper presented at ICMCTF, San Diego, 1996.
4. H. Moore, Generation and characterisation of nanoscale multilayer in a model binary system, J. Vac. Sci. (1996) paper presented at ICMCTF, San Diego, 1996.
5. V. Schier, H. Holleck, German Patent DE 195 03 070 C1, 1995.