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Volumn 2, Issue , 1997, Pages 1509-1513
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Fabrication and test of a filling station for micro/miniature devices
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Author keywords
[No Author keywords available]
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Indexed keywords
HEAT PIPES;
VACUUM TECHNOLOGY;
VALVES (MECHANICAL);
VACUUM BYPASS METHOD;
FILLING STATIONS;
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EID: 0031382478
PISSN: 0146955X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/iecec.1997.661993 Document Type: Conference Paper |
Times cited : (7)
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References (3)
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