Preparation of PLZT/LSCO/ITO/Si multilayer films by RF-magnetron sputtering

Ferroelectrics

Volumn 195, Issue 1-4, 1997, Pages 249-253

  Sun, Ping ^a   Sun, Tong ^a   Wu, Chongruo ^a   Li, Yongxiang ^a  

^a SOUTHEAST UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DIELECTRIC FILMS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC LOSSES; ELECTRIC RESISTANCE; LANTHANUM COMPOUNDS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PEROVSKITE; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING SILICON;

SHEET RESISTANCE;

MULTILAYERS;

EID: 0031381373     PISSN: 00150193     EISSN: None     Source Type: Journal    
DOI: 10.1080/00150199708260531     Document Type: Article

References (3)

1. R. Ramesh, B Dutta,T. S. Ravi, J. Lee, T. Sands, et al., Appl. Phys. lett., 64(12): 1588, (1994).
2. R. Ramesh, T. Sands, V. G. Keramidas, D. K. Fork, Mater. Sci. Eng., B22: 283, (1994).
3. Jeffrey T. Cheung and Peter E. D. Morgan, et al., Appl. Phys. Lett., 62(17): 2045, (1993).