Effects of heat treatment on the field emission property of amorphous carbon nitride

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 127-131

  Chi, Eung Joon ^a   Shim, Jae Yeob ^a   Baik, Hong Koo ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CHEMICAL VAPOR DEPOSITION; ELECTRON EMISSION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NITRIDES; PLASMA APPLICATIONS; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; ELASTIC RECOIL DETECTION ANALYSIS;

FIELD EMISSION CATHODES;

EID: 0031380858     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)