Structural characterization of crystalline Si-C-N films

Materials Research Society Symposium - Proceedings

Volumn 498, Issue , 1997, Pages 301-306

  Wang, E G ^a   Wang, Cheng Zhang ^a   Chen, Changfeng ^a   Chen, Yan ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; METHANE; NITROGEN; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION; SILICON CARBONITRIDE; STRUCTURAL CHARACTERIZATION;

SEMICONDUCTING FILMS;

EID: 0031380150     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-498-301     Document Type: Conference Paper

References (28)