Aluminum doped Indium Tin Oxide (ITO) films prepared by DC magnetron sputtering

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1997, Pages 230-236

  Saif, M ^a   Wrzesinski, A ^a   Patel, H ^a   Memarian, H ^a   Ward, R ^a  

^a Courtaulds Performance Films ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CARRIER CONCENTRATION; ELECTRIC CONDUCTIVITY MEASUREMENT; HALL EFFECT; MAGNETRON SPUTTERING; MORPHOLOGY; POLYETHYLENE TEREPHTHALATES; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DOPING; SPUTTER DEPOSITION; THERMODYNAMIC STABILITY; TRANSPARENCY;

INDIUM TIN OXIDE;

SEMICONDUCTING FILMS;

EID: 0031380061     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)