Change from polycrystalline to amorphous growth in sputtered CoZr/Cu multilayers

Materials Research Society Symposium - Proceedings

Volumn 472, Issue , 1997, Pages 215-220

  Langer, J ^a   Mattheis, R ^a   Schmidt, S ^a   Senz, S T ^a   Hesse, D ^a   Schuhrke, Th ^a   Fischer, R ^a   Zweck, J ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; COBALT COMPOUNDS; CRYSTAL GROWTH; CRYSTAL STRUCTURE; FILM PREPARATION; METALLIC FILMS; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION; SUBSTITUTION REACTIONS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

CRYSTALLINE COLUMNAR GROWTH; HARD SPHERE MODEL;

METALLIC SUPERLATTICES;

EID: 0031379702     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-472-215     Document Type: Conference Paper

References (6)