Thermal conductivity measurements of interlevel dielectrics

Materials Research Society Symposium - Proceedings

Volumn 473, Issue , 1997, Pages 279-284

  Varner, Elizabeth B ^a   Marieb, Thomas ^a   Mack, Anne Sauter ^a   Lee, Jin ^a   Meyer, William K ^a   Goodson, Kenneth E ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; HEAT CONDUCTION; MATHEMATICAL MODELS; PERMITTIVITY; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILMS;

INTERLEVEL DIELECTRICS (ILD);

DIELECTRIC MATERIALS;

EID: 0031379667     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-473-279     Document Type: Conference Paper

References (6)