Gated, single-tip silicon field emitter as a probe for investigating the defect dynamics of thin insulators

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 235-238

  Busta, Heinz H ^a  

^a SARNOFF CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; ELECTRIC CURRENTS; ELECTRIC INSULATING MATERIALS; INTERFACES (MATERIALS); MOS DEVICES; PROBES; SEMICONDUCTING SILICON;

GATED SINGLE TIP SILICON FIELD EMITTERS; THIN INSULATORS;

TUNNEL DIODES;

EID: 0031379622     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)