Fabrication and simulation of DLC field emitter triode

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 166-170

  Ko, Tae Young ^a   Chung, Bokeon ^a   Lee, Joo Yong ^a   Jeon, D ^a   Lee, K R ^a  

^a Myong Ji University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CURRENT VOLTAGE CHARACTERISTICS; ETCHING; SILICON WAFERS; SPUTTER DEPOSITION; TRIODES;

DIAMOND LIKE CARBON (DLC) FILM CATHODES;

FIELD EMISSION CATHODES;

EID: 0031377977     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)