Microscopic structure and generation mechanism of Eγ′ centers in buried oxide

IEEE International SOI Conference

Volumn , Issue , 1997, Pages 32-33

  Karna, Shashi P ^a   Pugh, Robert D ^a   Brothers, Charles P ^a   Shedd, Walter ^a   Singaraju, Babu B K ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTAL DEFECTS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRON SPIN RESONANCE SPECTROSCOPY; QUANTUM THEORY; SEMICONDUCTOR DEVICE MODELS;

OXYGEN DEFICIENT CENTER (ODC);

SILICON ON INSULATOR TECHNOLOGY;

EID: 0031377547     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)