Si texturing with sub-wavelength structures

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 1997, Pages 171-174

  Zaidi, Saleem H ^a   Brueck, S R J ^a  

^a UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; LIGHT ABSORPTION; LIGHT REFLECTION; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS; REACTIVE ION ETCHING; SINGLE CRYSTALS;

LASER INTERFEROMETRIC LITHOGRAPHY; WET ETCHING;

SEMICONDUCTING SILICON;

EID: 0031377167     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)