Amorphous diamond-like carbon films prepared by DC saddle-field glow-discharge method: doping with boron and phosphorus

Materials Research Society Symposium - Proceedings

Volumn 498, Issue , 1997, Pages 165-170

  Chan, W ^a   Allen, T ^a   Gaspari, F ^a   Szurmak, J ^a   Sagnes, E ^a   Zukotynski, S ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITION; DOPING (ADDITIVES); GLOW DISCHARGES; PHOSPHORUS; SEMICONDUCTING BORON; SEMICONDUCTING DIAMONDS;

AMORPHOUS HYDROGENATED FILM; DIAMOND LIKE CARBON; FILM DEPOSITION;

AMORPHOUS FILMS;

EID: 0031377153     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-498-165     Document Type: Conference Paper

References (10)