Astigmation detection and correction technique for micron focused ion beam

Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology

Volumn 17, Issue 6, 1997, Pages 400-405

  Wang, Xuechao ^a   Wang, Jianru ^a   Wang, Rongjun ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER APPLICATIONS; ERROR CORRECTION; ERROR DETECTION; FOCUSING; ION BEAMS;

ASTIGMATION CORRECTION; ASTIGMATION DETECTION;

IMAGE PROCESSING;

EID: 0031376169     PISSN: 02539748     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)