|
|
|
Volumn 454, Issue , 1997, Pages 53-58
|
|
Preparation and characterization of high-surface-area aluminum nitride thin films
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ALUMINA;
ALUMINUM COMPOUNDS;
CATALYST SUPPORTS;
ELECTRON DIFFRACTION;
FILM PREPARATION;
HEAT TREATMENT;
PHASE TRANSITIONS;
SECONDARY ION MASS SPECTROMETRY;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
HIGH SURFACE AREA ALUMINUM NITRIDE THIN FILMS;
NITRIDES;
|
|
EID: 0031375964
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (1)
|
|
References (9)
|
