Growth and characterization of thin film dielectrics for microwave applications

Integrated Ferroelectrics

Volumn 15, Issue 1-4, 1997, Pages 155-162

  O'Bryan, H M ^a   Watts, R K ^a   Hou, S ^a   Ma, Z X ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; BARIUM TITANATE; FILM GROWTH; FILM PREPARATION; MICROWAVE DEVICES; PERMITTIVITY; SPUTTER DEPOSITION; THIN FILMS;

RADIOFREQUENCY SPUTTERING;

DIELECTRIC FILMS;

EID: 0031375773     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708015706     Document Type: Article

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