Characterization of sputtered BZT thin films for MCM: Multichip module

AIChE Journal

Volumn 43, Issue 11 A, 1997, Pages 2844-2848

  Kamehara, Nobuo ^a   Tsukada, Mineharu ^a   Cross, Jeffrey S ^a   Kurihara, Kazuaki ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; CAPACITANCE; CRYSTAL ORIENTATION; FILM PREPARATION; LEAKAGE CURRENTS; MULTICHIP MODULES; PERMITTIVITY; PEROVSKITE; PLATINUM; SPUTTER DEPOSITION; THERMAL EFFECTS; THIN FILMS;

BARIUM ZIRCONIUM TITANATE;

CERAMIC CAPACITORS;

EID: 0031375086     PISSN: 00011541     EISSN: None     Source Type: Journal    
DOI: 10.1002/aic.690431333     Document Type: Article

References (6)