Impurity removing at dislocations in float zone silicon by aluminum-silicon alloying

Materials Research Society Symposium - Proceedings

Volumn 469, Issue , 1997, Pages 493-498

  Perichaud, I ^a   Martinuzzi, S ^a  

^a AIX MARSEILLE UNIVERSITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYING; ALUMINUM; ANNEALING; CRYSTAL IMPURITIES; DISLOCATIONS (CRYSTALS);

FLOAT ZONE SILICON; LIGHT BEAM INDUCED CURRENT (LBIC) MAPPING TECHNIQUE;

SILICON WAFERS;

EID: 0031374596     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)