Ion-sputter induced rippling of Si(111)

Materials Research Society Symposium - Proceedings

Volumn 440, Issue , 1997, Pages 461-466

  Erlebacher, Jonah D ^a   Aziz, Michael J ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COALESCENCE; ION BEAMS; MORPHOLOGY; SURFACE ROUGHNESS;

ION SPUTTER INDUCED RIPPLING;

SEMICONDUCTING SILICON;

EID: 0031373312     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)