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Volumn 467, Issue , 1997, Pages 567-572
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In-situ monitoring of surface hydrogen on the a-SiGe:H films
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION SPECTROSCOPY;
AMORPHOUS ALLOYS;
COMPOSITION;
DESORPTION;
FILM GROWTH;
HYDROGEN BONDS;
INFRARED SPECTROSCOPY;
SILICON ALLOYS;
THERMODYNAMIC STABILITY;
AMORPHOUS SILICON GERMANIUM ALLOY;
INFRARED REFLECTION ABSORPTION SPECTROSCOPY;
SURFACE HYDROGEN;
AMORPHOUS FILMS;
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EID: 0031372607
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-467-567 Document Type: Conference Paper |
Times cited : (3)
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References (8)
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