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Volumn 467, Issue , 1997, Pages 567-572

In-situ monitoring of surface hydrogen on the a-SiGe:H films

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; AMORPHOUS ALLOYS; COMPOSITION; DESORPTION; FILM GROWTH; HYDROGEN BONDS; INFRARED SPECTROSCOPY; SILICON ALLOYS; THERMODYNAMIC STABILITY;

EID: 0031372607     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-467-567     Document Type: Conference Paper
Times cited : (3)

References (8)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.