Role of material structure on molecular diffusion of hydrogen in a-Si:C:H films

Materials Research Society Symposium - Proceedings

Volumn 467, Issue , 1997, Pages 141-146

  Ullersma, E H C ^a   Inia, D K ^a   Habraken, F H P M ^a   Van Sark, W G J H M ^a   Van der Weg, W F ^a   Westerduin, K T ^a   Van Veen, A ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL BONDS; DIFFUSION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; HYDROGENATION; MOLECULAR DYNAMICS; MOLECULAR STRUCTURE; PLASMA APPLICATIONS; SILICON CARBIDE; SPECTROMETRY; TEMPERATURE;

ELASTIC RECOIL DETECTION; MOLECULAR DIFFUSION; MOLECULAR TRANSPORT; THERMAL DESORPTION SPECTROMETRY;

AMORPHOUS FILMS;

EID: 0031372270     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-467-141     Document Type: Conference Paper

References (12)