Visually servoed micropositioning for assembly of hybrid MEMS: Theory and experiments

Proceedings of the IEEE Conference on Decision and Control

Volumn 1, Issue , 1997, Pages 96-101

  Vikramaditya, Barmeshwar ^a   Lord, Jeffrey G ^a   Nelson, Bradley J ^a  

^a UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; FACTORY AUTOMATION; FEEDBACK; OPTICAL MICROSCOPY; OPTIMAL CONTROL SYSTEMS; REAL TIME SYSTEMS; SENSORS; SERVOMECHANISMS;

VISUAL SERVOING SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031370328     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)