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Volumn 498, Issue , 1997, Pages 253-258
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On the effects of the thermal treatment on the structural, mechanical and tribological properties of amorphous carbon-nitrogen films deposited by magnetron sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
ATOMIC FORCE MICROSCOPY;
CARBON;
HARDNESS;
INFRARED SPECTROSCOPY;
MAGNETRON SPUTTERING;
MICROSTRUCTURE;
NITROGEN;
RESIDUAL STRESSES;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SURFACE ROUGHNESS;
TRIBOLOGY;
ATOMIC DENSITY;
ELASTIC RECOIL DETECTION ANALYSIS;
FILM MICROSTRUCTURE;
FRICTION COEFFICIENT;
NANOINDENTATION;
NUCLEAR REACTION ANALYSIS;
AMORPHOUS FILMS;
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EID: 0031369592
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-498-253 Document Type: Conference Paper |
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Times cited : (2)
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References (16)
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