Improvement of thermal stability of metal/oxide interface for electronic devices

Materials Research Society Symposium - Proceedings

Volumn 494, Issue , 1997, Pages 143-148

  Ichikawa, Yo ^a   Hiramoto, Masayoshi ^a   Matsukawa, Nozomu ^a   Iijima, Kenji ^a   Kitagawa, Masatoshi ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

IRON; IRON OXIDES; MAGNETIC PROPERTIES; MOS DEVICES; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SPUTTER DEPOSITION; THERMODYNAMIC STABILITY;

PULSE REACTIVE SPUTTERING;

HETEROJUNCTIONS;

EID: 0031369445     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-494-143     Document Type: Conference Paper

References (5)