LCVD of CNx layers from NH3/CCl4 mixture using CuBr vapor laser

Materials Research Society Symposium - Proceedings

Volumn 498, Issue , 1997, Pages 271-276

  Ivanov, B ^a   Popov, C ^a   Dimitrov, D ^a   Shanov, V ^a   Zambov, L ^a   Georgiev, M ^a   Peev, G ^a  

^a UNIVERSITY OF CHEMICAL TECHNOLOGY AND METALLURGY   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY MEASUREMENT; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER APPLICATIONS; NITRIDES; NITROGEN; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SURFACE ROUGHNESS;

AMORPHOUS CARBON NITRIDE; LASER INDUCED CHEMICAL VAPOR DEPOSITION;

THIN FILMS;

EID: 0031369432     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)