Polymer bonding technique for silicon micromoulds

Proceedings of the Australian Microelectronics Conference

Volumn , Issue , 1997, Pages 129-133

  Kang, I B ^a   Manda, M ^a   Hariz, A ^a   Samaan, N D ^a   Haskard, M R ^a  

^a UNIVERSITY OF SOUTH AUSTRALIA   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ELECTROPLATING; PHOTORESISTS; SEMICONDUCTING GLASS; SEMICONDUCTING POLYMERS; SILICON ON INSULATOR TECHNOLOGY;

POLYMER BONDING; SILICON MICROMOULDS; SILICON WAFER BONDING; SODALIME GLASS;

SILICON WAFERS;

EID: 0031368847     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)