Selective area growth on planar masked InP substrates by metal organic vapour phase epitaxy (MOVPE)

Progress in Crystal Growth and Characterization of Materials

Volumn 35, Issue 2-4, 1997, Pages 263-288

  Van Caenegem, Tom ^a   Moerman, Ingrid ^a   Demeester, Piet ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; DIFFUSION IN SOLIDS; MASKS; METALLORGANIC VAPOR PHASE EPITAXY; QUANTUM EFFICIENCY; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR QUANTUM DOTS; SEMICONDUCTOR QUANTUM WELLS;

DIELECTRIC STRIPES; SELECTED AREA GROWTH (SAG);

SEMICONDUCTOR GROWTH;

EID: 0031368153     PISSN: 09608974     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0960-8974(98)00003-5     Document Type: Article

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