Analysis of electrical test data using a neural network approach

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1997, Pages 37-41

  Koppenhoefer, B ^a   Wuerthner, S ^a   Ludwig, L ^a   Rosenstiel, W ^a   Kuge, H H ^a   Hummel, M ^a   Federl, P ^a  

^a Institut fuer Organische Chemie   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; NEURAL NETWORKS; PROCESS CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

ELECTRICAL TEST DATA; PROCESS CONTROL MONITORS;

SEMICONDUCTOR DEVICE TESTING;

EID: 0031368011     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)